In this paper, we present a method for measuring the focal length of large aperture lenses using reflective computergenerated hologram (CGH). The CGH is designed to emulate the properties of a large aperture retrosphere through diffraction when performing null test of a lens with an interferometer. To validate this test approach, we designed and fabricated a 450 mm × 450 mm reflective CGH specifically for testing the 440 mm × 440 mm spatial filter lenses with a focal length of 31984.222 mm (@ 632.8 nm). Experiments and error analysis were carried out. The results show that the CGH test approach features high accuracy and good repeatability.
The transmitted wavefront mid-spatial-frequency(MSF) errors of spherical lens has a great influence on the quality of the transmitted beam. Aiming at the problems of poor convergence precision and low convergence efficiency in mid-spatial frequency errors polishing of large square spherical lenses, this paper proposes a mid-spatial-frequency errors correction technology by using full-aperture rigid polishing combined with numerically controlled sub-aperture smooth polishing. In the full-aperture polishing stage, the surface shape distribution that is conducive to subsequent sub-aperture polishing is obtained through radius compensation technology to reduce the sudden change of surface shape in the corner area of the component. The more rigid polishing pad is used to smooth the whole surface then, so that the component has better MSF errors condition before the sub-aperture high-precision surface correction. In the stage of small tool CNC polishing, the transmission structure and mass distribution of the polishing disc are optimized, and the ideal transmission characteristics and size parameters of the polishing disc are obtained through mechanical simulation analysis to reduce the overturning moment of the polishing disc when the direction changes suddenly. This optimization also improves the pressure distribution of the polishing interface. Stability, a flexible polishing disc combined with a high dispersion polishing slurry is used to correct the surface errors. The concentration of the polishing slurry is optimized and the supply method is well changed. So when the surface shape errors convergence process is more efficient and controllable, it will not cause the deterioration of the MSF errors. The smooth tool is applied in the last stage with reducing the temperature change of the polishing interface. All these measures are aimed to increase the stability of smooth polishing and to achieve high-efficiency, high-precision and stable convergence of MSF errors. The experimental verification was carried out on four square spherical lenses with a size of 440mm×440mm. The final PSD1:RMS values have all reached within 1.8nm. Additionally the overall processing time has been greatly shortened.
In this paper, we present a method of using computer-generated hologram (CGH) to measure the mid-spatial frequency error of large aperture lenses. To validate this test approach, we designed and fabricated a 450 mm × 450 mm reflective CGH for testing the 440 mm × 440 mm spatial filter lens with a focal length of 32500 mm. In our experiment, both the 0th and 1st order diffraction wavefront of CGH were measured, and the 0th order diffraction wavefront was used to calibrate the substrate error. The mid-spatial frequency error caused by the CGH fabrication errors were evaluated using the binary linear grating model and power spectral density theory (PSD). Experimental results and error analysis indicate that the measurement accuracy of PSD1 is ~0.9 nm RMS, which means the CGH test approach can be used to measure the mid-spatial frequency error of large aperture lenses.
We present a method of using computer-generated hologram (CGH) to measure the radius of curvature of large
aperture long-focal-length lens. In this method, a large aperture transmission CGH is used as a transmission sphere to
generate the test and reference wavefronts by means of diffraction. To verify the feasiblity of this method, a 450 mm ×
450 mm transmission CGH is designed and fabricated for measuring the radius of 440 mm × 440 mm spatial filter lens.
Experimental results and error analysis show that the CGH test method features high accuracy and good repeatability.
Automatic measurement of single points schema by coordinate measuring machine(CMM) is used to measure the Ultra-Long curvature radius of spherical optical element. The removal quantity of each measuring point can be calculated through contrasting the measure value and the theoretical value. A removal model of spherical optical element polishing is established based on Preston equation, and the required machining parameters are predicted by removal simulation in MATLAB. A processing test on a fused silicon with an aperture of 440mm×440mm was performed and the result shows that the model is effective in Ultra-Long curvature radius control of spherical optical element during full aperture polishing.
This article mainly take the research in controlling the parallelism of the Φ200mm×10mm sapphire window during the polishing fabrication. First, in the period of full aperture polishing by adjusting the polishing parameters ,the parallelism of the sapphire window conversed to the level of below 3", then we took the sub-aperture ion-beam polishing technique to make the further convergence of the parallelism, in this precise polishing stage, with the ion-beam figuring machine IBF600, the parallelism error was converted to the surface tilt error map ,through the proper choice of the removal function and dwell time calculation, the thin sapphire window’s parallelism converged to subsecond accuracy which satisfied the application requirement of this element
In large-scale high-power laser devices, the mid-spatial-frequency(MSF) error of the transmitted wavefront of the large-aperture spherical lens has a direct impact on the energy scattering of the high power laser. This paper proposes a technology about correction of MSF error of large-aperture spherical lens based on computer numerical control polishing. A smooth polishing theoretical model is established for spherical lens and the removal function morphology is optimized. To make a better MSF error convergence, the rigid conformed tool is designed and assembled. The polishing tool and the main axle are connected by a high-precision universal joint, so that the polishing pad can be flexibly attached to the surface of the workpiece when the tool is running. This makes it able to polish the square spherical workpiece with large curvature radius by the processing method of planar workpiece. In the earlier stage, two kinds of path are applied to converge the low- frequency error by crossing each other. Then the random path is applied for MSF error convergence. By the experimental varification of Four fused silica spherical lens with aperture of 440 mm × 440 mm, the RMS value of the PSD1 frequency band of the lens’ transmitted wavefront error is finally converg-ence to 2.2 nm through once MSF error correction.
In view of the problem of projection distortion in the result of aberration-free point test of off-axis paraboloid mirror, this paper analyzes its formation principle, puts forward a transformation method from the detection coordinate system to the processing coordinate system, according to the mathematical relationship between the two, reconstructs the surface shape of the detection result, realizes the transformation of projection distortion image, and analyzes the error of the transformation result by using the fucial function. It is proved that this method is feasible by using the reconstructed surface results to guide the NC Polishing.
In order to improve the stability of the removal function for aspheric surface and realizes its machining. A polishing tool based on non-Newtonian fluid (silly putty) is designed. The influence of shear stress of silly putty in polishing tools on the pressure distribution on the aspheric surface is analyzed. According Preston equation, the removal function of non- Newtonian fluid polishing tool is optimized theoretically based on its surface pressure distribution with the polishing tool executing a planetary motion of the polishing tool. The influence of the structure, materials and driving mode of polishing tool on the removal function shape was analyzed. Then, the polishing tool was improved and the marks on the removal spot were removed. The effect of filling rat io of silly putty and process parameters on removal function was studied by experiments. A method of obtaining stable removal function based on non-Newtonian fluid polishing tools is presented.
For large-scale high-power laser devices, the transmitted wavefront gradient root mean square (GRMS) is one of the most important indexes for evaluating the low-frequency distortion of spherical lenses. In this paper, for the low-frequency error index requirement of large-diameter spatial filter lens, a conformed polishing method based on composite tool is proposed in the spherical CCOS polishing stage. Based on the detection results of the optical components, the GRMS distribution is separated by low-pass filtering, and the high value of GRMS is partitioned by K-means algorithm to determine the polishing path and dwelling time. A composite conformed polishing tool is designed and the simulation analysis of the polishing tool structure and polishing stress distribution are carried out to optimize the parameters, in order to obtain an ideal GRMS convergence removal function. After experiments and production verifications of several 440×440 sized spatial filter lenses, the results show that the GRMS can be quickly converged below 7nm/cm, and the convergence rate is improved by about 50% compared with the traditional CNC polishing.
By the ion-beam figuring machine IBF600, a 630 mm aperture fused silica flat standard mirror was polished up to surface PV value 38.9 nm and RMS 6.556 nm in low frequency error, during the same time ,the mirror’s mid-spatial frequency(spatial frequency band 2.5 mm~33 mm) wavefront RMS error converged to 1.502 nm from initial value 2.022 nm.During the process, two removal functions were used in the simulation after parameter optimization. According to the residual error map, we choose the appropriate removal function and calculate the dwell time, finally we successfully attained the optical acquirements of the standard mirror in both low and middle frequency error, this high middle frequency.
This article mainly take the research on the technique of fabricating a steep off-axis aspherical mirror based on infrared interferometric testing. In the stage of asphercal shape grinding ,we take use of an infrared interferometer to test the aspherical surface error rapidly, along with the arm-swinging polishing method and choose the appropriate processing parameters according to the testing results. After more than twenty times polishing and testing circles ,the off-axis mirror’s wavefront error converge to PV≤5 λ,RMS≤1 λ(λ=632.8nm),this surface map is suitable for the final sub-surface polishing. Through these research and experiments, we have verified the applied advantage of infrared interferometric technique in fabricating steep off-axis aspherical mirror. This technology is also very useful in the processing other types of large-scale aspherical mirrors.
In order to process full spatial frequency range error of steep aspheric surface, a self-adaption polishing tool was designed based on silly putty, and the principle of silly putty used on polishing tool to process middle and low spatial frequency errors was analyzed. The effect of silly putty’s viscosity on pressure was calculated by Newton’s law of viscosity. Stability of polishing pressure was compared between self-adaption polishing tool and pith lap through calculating polishing pressure. A 470mm aperture concave aspheric whit F#1.8 and 1.8mm departure from the best-fit radius is employed to operate experiment. It was verified that self-adaption polishing tool have the capability processing full frequency range error.
As an excellent optical element material, CaF2 crystal has a wide-spectrum transmission range and stable physicochemical properties. Due to the soft and brittle nature of CaF2 crystal, also with high coefficient of thermal expansion and low heat conductivity coefficient, it is of great significance to study the stability and characterization of the removal function during the processing of large-diameter CaF2 optical elements with specific geometric requirements. In this paper, a Φ200 mm CaF2 crystal plate was taken as the research object. The stable technique of grinding and polishing calcium fluoride is researched and the pressure is treated as the key factor. The specialized tool is designed to control the pressure. The removal model of grinding and polishing is stablished based on the specialized tool. The pressure distribution of grinding and polishing process is simulated and the optimized pressure distribution is obtained. This makes the whole face error converged efficiently and stably, meanwhile the face to face angle can be controlled precisely. As a conclusion, the PV value of experimental element is less than 0.13λ within the aperture, and the face to face angle is restrained into 5″ after using new tools.
A 520mm aperture SiC flat mirror was manufactured up to RMS accuracy of 10.8nm in 50 days. Through the analysis of SiC material removal principle during full aperture polishing, we chose the appropriate parameters of polishing in full aperture polishing process and quickly made the surface error convergence to RMS value 100nm, then we took the step to small tool polishing, the adjustment of the remove function in this process was taken in order to coordinate the hard material’s properties, the efficiency in PV and RMS convergence was presented according to the experimental results. After four week’s polishing ,the RMS value successfully reduced to 10.8 nm and reached the technical requirements of this large flat SiC mirror.
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