Mid-spatial frequency error measurement of large aperture lenses

Jian-Peng Cui; Zhi-Gang Li; Heng Zhao; Ning Zhang; Zhen-Jun Bao; Di-Long Wu; Hua Xu

doi:10.1117/12.2687466

27 November 2023 Mid-spatial frequency error measurement of large aperture lenses

Jian-Peng Cui, Zhi-Gang Li, Heng Zhao, Ning Zhang, Zhen-Jun Bao, Di-Long Wu, Hua Xu

Author Affiliations +

Proceedings Volume 12769, Optical Metrology and Inspection for Industrial Applications X; 127690L (2023) https://doi.org/10.1117/12.2687466
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Abstract

In this paper, we present a method of using computer-generated hologram (CGH) to measure the mid-spatial frequency error of large aperture lenses. To validate this test approach, we designed and fabricated a 450 mm × 450 mm reflective CGH for testing the 440 mm × 440 mm spatial filter lens with a focal length of 32500 mm. In our experiment, both the 0th and 1st order diffraction wavefront of CGH were measured, and the 0th order diffraction wavefront was used to calibrate the substrate error. The mid-spatial frequency error caused by the CGH fabrication errors were evaluated using the binary linear grating model and power spectral density theory (PSD). Experimental results and error analysis indicate that the measurement accuracy of PSD1 is ~0.9 nm RMS, which means the CGH test approach can be used to measure the mid-spatial frequency error of large aperture lenses.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Jian-Peng Cui, Zhi-Gang Li, Heng Zhao, Ning Zhang, Zhen-Jun Bao, Di-Long Wu, and Hua Xu "Mid-spatial frequency error measurement of large aperture lenses", Proc. SPIE 12769, Optical Metrology and Inspection for Industrial Applications X, 127690L (27 November 2023); https://doi.org/10.1117/12.2687466

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