The transmitted wavefront mid-spatial-frequency(MSF) errors of spherical lens has a great influence on the quality of the transmitted beam. Aiming at the problems of poor convergence precision and low convergence efficiency in mid-spatial frequency errors polishing of large square spherical lenses, this paper proposes a mid-spatial-frequency errors correction technology by using full-aperture rigid polishing combined with numerically controlled sub-aperture smooth polishing. In the full-aperture polishing stage, the surface shape distribution that is conducive to subsequent sub-aperture polishing is obtained through radius compensation technology to reduce the sudden change of surface shape in the corner area of the component. The more rigid polishing pad is used to smooth the whole surface then, so that the component has better MSF errors condition before the sub-aperture high-precision surface correction. In the stage of small tool CNC polishing, the transmission structure and mass distribution of the polishing disc are optimized, and the ideal transmission characteristics and size parameters of the polishing disc are obtained through mechanical simulation analysis to reduce the overturning moment of the polishing disc when the direction changes suddenly. This optimization also improves the pressure distribution of the polishing interface. Stability, a flexible polishing disc combined with a high dispersion polishing slurry is used to correct the surface errors. The concentration of the polishing slurry is optimized and the supply method is well changed. So when the surface shape errors convergence process is more efficient and controllable, it will not cause the deterioration of the MSF errors. The smooth tool is applied in the last stage with reducing the temperature change of the polishing interface. All these measures are aimed to increase the stability of smooth polishing and to achieve high-efficiency, high-precision and stable convergence of MSF errors. The experimental verification was carried out on four square spherical lenses with a size of 440mm×440mm. The final PSD1:RMS values have all reached within 1.8nm. Additionally the overall processing time has been greatly shortened.
Automatic measurement of single points schema by coordinate measuring machine(CMM) is used to measure the Ultra-Long curvature radius of spherical optical element. The removal quantity of each measuring point can be calculated through contrasting the measure value and the theoretical value. A removal model of spherical optical element polishing is established based on Preston equation, and the required machining parameters are predicted by removal simulation in MATLAB. A processing test on a fused silicon with an aperture of 440mm×440mm was performed and the result shows that the model is effective in Ultra-Long curvature radius control of spherical optical element during full aperture polishing.
By the ion-beam figuring machine IBF600, a 630 mm aperture fused silica flat standard mirror was polished up to surface PV value 38.9 nm and RMS 6.556 nm in low frequency error, during the same time ,the mirror’s mid-spatial frequency(spatial frequency band 2.5 mm~33 mm) wavefront RMS error converged to 1.502 nm from initial value 2.022 nm.During the process, two removal functions were used in the simulation after parameter optimization. According to the residual error map, we choose the appropriate removal function and calculate the dwell time, finally we successfully attained the optical acquirements of the standard mirror in both low and middle frequency error, this high middle frequency.
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