The control technical research of the subsecond accuracy parallelism in polishing sapphire window

Heng Zhu; Zhen-jun Bao; Di-long Wu; Ping Ma

doi:10.1117/12.2585427

4 December 2020 The control technical research of the subsecond accuracy parallelism in polishing sapphire window

Heng Zhu, Zhen-jun Bao, Di-long Wu, Ping Ma

Author Affiliations +

Proceedings Volume 11617, International Conference on Optoelectronic and Microelectronic Technology and Application; 1161735 (2020) https://doi.org/10.1117/12.2585427
Event: International Conference on Optoelectronic and Microelectronic Technology and Application, 2020, Nanjing, China

Abstract

This article mainly take the research in controlling the parallelism of the Φ200mm×10mm sapphire window during the polishing fabrication. First, in the period of full aperture polishing by adjusting the polishing parameters ,the parallelism of the sapphire window conversed to the level of below 3", then we took the sub-aperture ion-beam polishing technique to make the further convergence of the parallelism, in this precise polishing stage, with the ion-beam figuring machine IBF600, the parallelism error was converted to the surface tilt error map ,through the proper choice of the removal function and dwell time calculation, the thin sapphire window’s parallelism converged to subsecond accuracy which satisfied the application requirement of this element

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Heng Zhu, Zhen-jun Bao, Di-long Wu, and Ping Ma "The control technical research of the subsecond accuracy parallelism in polishing sapphire window", Proc. SPIE 11617, International Conference on Optoelectronic and Microelectronic Technology and Application, 1161735 (4 December 2020); https://doi.org/10.1117/12.2585427

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