Takuya Kono
Senior Manager at KIOXIA Corp
SPIE Involvement:
Author
Publications (32)

Proceedings Article | 10 April 2024 Presentation
Masaki Mitsuyasu, Norikazu Takeuchi, Masanori Hirose, Shunsuke Honda, Akihiko Ando, Toshiaki Komukai, Motofumi Komori, Takuya Kono
Proceedings Volume PC12956, PC129560G (2024) https://doi.org/10.1117/12.3010093
KEYWORDS: Nanoimprint lithography, Overlay metrology, Optical lithography, Line edge roughness, High volume manufacturing, Etching, Yield improvement, Sustainable technology, Semiconductors, Semiconducting wafers

Proceedings Article | 1 May 2023 Presentation + Paper
Norikazu Takeuchi, Genna Hasegawa, Toshiaki Komukai, Takahiro Iwasaki, Masayuki Hatano, Motofumi Komori, Takuya Kono
Proceedings Volume 12497, 124970E (2023) https://doi.org/10.1117/12.2657912
KEYWORDS: Silica, Photoresist processing, Electron beam lithography, Resistance, Semiconducting wafers, Fabrication, Optical lithography, Lithography

Proceedings Article | 13 June 2022 Presentation
Kazuya Fukuhara, Masaki Mitsuyasu, Ryo Ogawa, Katsuya Abe, Anupam Mitra, Sachiko Kobayashi, Satoshi Mitsugi, Motofumi Komori, Takuya Kono
Proceedings Volume PC12054, PC120540B (2022) https://doi.org/10.1117/12.2614407
KEYWORDS: Optical alignment, Semiconducting wafers, Nanoimprint lithography, Lithography, Semiconductor manufacturing, Semiconductors, Overlay metrology, Optical simulations, Manufacturing, Wafer-level optics

Proceedings Article | 26 May 2022 Presentation + Paper
Proceedings Volume 12052, 1205208 (2022) https://doi.org/10.1117/12.2614319
KEYWORDS: Nanoimprint lithography, Semiconducting wafers, Optical alignment, Optical lithography, Scanning electron microscopy, Ultraviolet radiation, Lithography, Scanning transmission electron microscopy

SPIE Journal Paper | 4 March 2022
JM3, Vol. 21, Issue 01, 011008, (March 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.1.011008
KEYWORDS: Nanoimprint lithography, Semiconducting wafers, Lithography, Head, Photoresist processing, Coating, System on a chip, Overlay metrology, Capillaries, Ultraviolet radiation

Showing 5 of 32 publications
Conference Committee Involvement (1)
Novel Patterning Technologies 2025
23 February 2025 | San Jose, California, United States
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