CONFERENCE PROCEEDINGS
Advanced Search
Hyuntaek Oh
at Inha Univ
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 25 May 2022 Presentation + Paper
Perfluoroalkylated metallophthalocyanines as EUV resist candidates
Yejin Ku, Jun-il Kim, Hyun-Taek Oh, Youngtae Kim, Minkyu Choi, Jin-Kyun Lee, Kang-Hyun Kim, Byeong-Gyu Park, Sangsul Lee, Chawon Koh, Tsunehiro Nishi, Hyun-Woo Kim
Proceedings Volume 12055, 120550D (2022) https://doi.org/10.1117/12.2612313
KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Electron beam lithography, Zinc, Lithography, Thin films, Metals
Proceedings Article | 22 February 2021 Presentation + Paper
Highly fluorinated alternating copolymers possessing high glass transition temperature and cross-linking capabilities under extreme UV radiation
Ye-Jin Ku, Hyun-Taek Oh, Kanghyun Kim, Byeong-Gyu Park, Sangsul Lee, Jin-Kyun Lee
Proceedings Volume 11612, 116120J (2021) https://doi.org/10.1117/12.2582948
KEYWORDS: Polymers, Glasses, Extreme ultraviolet lithography, Extreme ultraviolet, Ultraviolet radiation, Thin films, Polymerization, Chemistry, Semiconductors, Photoresist materials
Proceedings Article | 23 March 2020 Paper
Molecular resists equipped with fluorinated aromatic units for electron-beam and extreme UV lithography
Hyun-Taek Oh, Kanghyun Kim, Byeon-Gyu Park, Sangsul Lee, Jin-Kyun Lee
Proceedings Volume 11326, 113260B (2020) https://doi.org/10.1117/12.2551833
KEYWORDS: Fluorine, Extreme ultraviolet lithography, Electron beam lithography, Extreme ultraviolet, Polymers, Lithography, Thin films, Photons
Proceedings Article | 25 March 2019 Presentation + Paper
Imaging behavior of highly fluorinated molecular resists under extreme UV radiation
Hyuntaek Oh, Seok-Heon Jung, Jeong-Seok Mun, Kanghyun Kim, Sangsul Lee, Jin-Kyun Lee
Proceedings Volume 10960, 1096012 (2019) https://doi.org/10.1117/12.2514928
KEYWORDS: Electron beam lithography, Extreme ultraviolet lithography, Extreme ultraviolet, Polymers, Thin films, Silicon, Lithography, Ultraviolet radiation, Molecules, Photons
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top