Minkyu Choi
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 25 May 2022 Presentation + Paper
Yejin Ku, Jun-il Kim, Hyun-Taek Oh, Youngtae Kim, Minkyu Choi, Jin-Kyun Lee, Kang-Hyun Kim, Byeong-Gyu Park, Sangsul Lee, Chawon Koh, Tsunehiro Nishi, Hyun-Woo Kim
Proceedings Volume 12055, 120550D (2022) https://doi.org/10.1117/12.2612313
KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Electron beam lithography, Zinc, Lithography, Thin films, Metals

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