Dr. Liang Cao Profile

Dr. Liang Cao

Product Engineer at Mentor a Siemens Business

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Author

Publications (6)

Proceedings Article | 28 April 2023 Presentation + Paper

Unsupervised ML classification driven process model coverage check

SeungWon Song, Seokyoon Jeong, Sangwoo Park, Jungkee Choi, WoonHyuk Choi, No-young Chung, Seongtae Jeong, Fan Jiang, Liang Cao, Le Hong, Junhyoung Park, Doohwan Kwak, Jongwon Lee, Harin Kim, Jiyoung Lee

Proceedings Volume 12495, 1249518 (2023) https://doi.org/10.1117/12.2658322

KEYWORDS: Data modeling, Process modeling, Machine learning, Optical proximity correction, Statistical modeling, Calibration, Instrument modeling, Metrology, Design and modelling, Resolution enhancement technologies

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Proceedings Article | 23 March 2020 Presentation + Paper

Reduction of systematic defects with machine learning from design to fab

Yuansheng Ma, Le Hong, James Word, Fan Jiang, Vlad Liubich, Liang Cao, Srividya Jayaram, Doohwan Kwak, YoungChang Kim, Germain Fenger, Ananthan Raghunathan, Joerg Mellmann

Proceedings Volume 11329, 1132909 (2020) https://doi.org/10.1117/12.2551703

KEYWORDS: Machine learning, Optical proximity correction, Photomasks, Etching, Data modeling, Process modeling, Neural networks, Semiconducting wafers, Inspection

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Proceedings Article | 20 March 2018 Presentation + Paper

Optimization of optical proximity correction to reduce mask write time using genetic algorithm

Gregory Dick, Liang Cao, Abhishek Asthana, Jing Cheng, David Power

Proceedings Volume 10588, 1058806 (2018) https://doi.org/10.1117/12.2297400

KEYWORDS: Optical proximity correction, Genetic algorithms, Optimization (mathematics), Photomasks, Data processing

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Proceedings Article | 16 October 2017 Paper

Implementation of CDSEM contour extraction on OPC verification

Liang Cao, Jie Zhang, Hongxin Zhang, Jiechang Hou, Guoxiang Ning, William Wilkinson, Shaowen Gao, Norman Chen

Proceedings Volume 10451, 104510Z (2017) https://doi.org/10.1117/12.2280422

KEYWORDS: Silicon, Optical proximity correction, Critical dimension metrology, Image processing, Lithography, Data modeling, Metrology, Semiconducting wafers, Statistical analysis, Scanning electron microscopy

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Proceedings Article | 16 October 2017 Paper

Automatic SRAF printing detection based on contour extraction

Liang Cao, Jie Zhang, Wenchao Jiang, Jiechang Hou, Dongqing Zhang, Wei-long Wang

Proceedings Volume 10451, 104511J (2017) https://doi.org/10.1117/12.2280186

KEYWORDS: SRAF, Printing, Image classification, Gaussian filters, Feature extraction, Image filtering, Edge detection, Semiconducting wafers, Detection and tracking algorithms, Silicon

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Proceedings Article | 5 October 2016 Paper

Auto-score system to optimize OPC recipe parameters using genetic algorithm

Liang Cao, Abhishek Asthana, Guoxiang Ning, Jui-Hsuan Feng, Jie Zhang, William Wilkinson

Proceedings Volume 9985, 998525 (2016) https://doi.org/10.1117/12.2241178

KEYWORDS: Optical proximity correction, Genetic algorithms, Algorithms, Bridges, Genetics, Ions, Computer simulations, Lithography, Yield improvement, Semiconducting wafers

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Showing 5 of 6 publications

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