CONFERENCE PROCEEDINGS
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Dr. Ju-Hyung Lee
Assistant Professor at Univ of Seoul
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Author
Publications (4)
Proceedings Article | 28 August 2003 Paper
Extension of Cr-less PSM to sub-90-nm node DRAM and logic device
Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504280
KEYWORDS: Photomasks, Nanoimprint lithography, Logic, Phase shifts, Lithography, Manufacturing, Scanners, Semiconducting wafers, Logic devices, Scanning electron microscopy
Proceedings Article | 26 June 2003 Paper
Evaluation of ArF CLM in the sub-100-nm DRAM cell
Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485406
KEYWORDS: Photomasks, Nanoimprint lithography, Phase shifts, Manufacturing, Chlorine, Lithography, Scanners, Semiconducting wafers, Quartz, Scanning electron microscopy
Proceedings Article | 12 June 2003 Paper
Most feasible curing process for ArF resists in device integration aspect
Hyun-Woo Kim, Yool Kang, Ju-Hyung Lee, Yun-Sook Chae, Sang-Gyun Woo, Han-Ku Cho, Woo-Sung Han
Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485119
KEYWORDS: Vacuum ultraviolet, Etching, Scanning electron microscopy, Dry etching, Resistance, Line edge roughness, Critical dimension metrology, Inspection, Lithography, Particles
Proceedings Article | 27 December 2002 Paper
Validation of ArF chromeless PSM in the sub-100-nm node DRAM cell
Proceedings Volume 4889, (2002) https://doi.org/10.1117/12.467504
KEYWORDS: Photomasks, Nanoimprint lithography, Phase shifts, Lithography, Scanners, Surface plasmons, Scanning electron microscopy, Manufacturing, Quartz, Semiconducting wafers
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