Dr. Hyung-Jong Ko Profile

Dr. Hyung-Jong Ko

at SAMSUNG Electronics Co Ltd

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 27 April 2023 Presentation + Paper

A novel method for improving yield prediction by matching layout pattern and defect inspection

Min-Chul Han, Chang-Hun Ko, Cheol-Hwan Kim, Masayuki Terai, Hye-Sun Kim, Oh-Hun Kwon, Ji-Hyun Cheon, Jin-Woo Choi, Jung-Hoon Park, Kyu-Sul Park, Jae-Ho Pak, Do-Youn Park, Seung-Ryeol Oh, Min-Su Kim, Hyun-Woo Ryoo, Myung-Chul Shin, Bo-Tak Lim, Il-Mok Park, Hyuck-Joon Kwon, Yoon-Jong Song, Jung-Yun Choi, Gwan-Hyeob Koh, Hyung-Jong Ko, Yu-Gyun Shin

Proceedings Volume 12496, 124961N (2023) https://doi.org/10.1117/12.2656206

KEYWORDS: Semiconducting wafers, Defect inspection, Inspection, Yield improvement, Failure analysis, Electrical breakdown, Semiconductors, Manufacturing, Logic, Image classification

Read Abstract +

Proceedings Article | 26 May 2022 Poster + Paper

An automated system for detecting systematic defect in memory cell array

Ji-Seong Jeong, Chang-Hun Ko, Seung-Eun Yu, Oh-Hun Kwon, Tae-Hyeong Ku, Tae-Heon Kim, Dong-Won Lim, Bo-Tak Lim, Hyuck-Joon Kwon, Jung-Yun Choi, Hyung-Jong Ko

Proceedings Volume 12053, 120531N (2022) https://doi.org/10.1117/12.2605606

KEYWORDS: Scanning electron microscopy, Optical inspection, Defect detection, Image segmentation, Inspection, Image processing algorithms and systems, Image enhancement, Design for manufacturing, Defect inspection, Visualization

Read Abstract +

Proceedings Article | 26 May 2022 Presentation + Paper

A machine learning based framework for correcting the interlayer misalignment of physical design in 3D-NAND flash

Cheol-Hwan Kim, Jong-Min Lee, Ji-Chang Sim, Sang-Eun Go, Hyo-Seok Woo, Dong-Yun Kim, Oh-Hun Kwon, Bo-Tak Lim, Jae-Sun Yun, Hong-Soo Kim, Hyuck-Joon Kwon, Jung-Yun Choi, Hyung-Jong Ko

Proceedings Volume 12052, 120520B (2022) https://doi.org/10.1117/12.2613625

KEYWORDS: Data modeling, Machine learning, Performance modeling, Optical proximity correction, Bridges

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years