Tae-Hyeong Ku
at SAMSUNG Electronics Co., Ltd.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 26 May 2022 Poster + Paper
Proceedings Volume 12053, 120531N (2022) https://doi.org/10.1117/12.2605606
KEYWORDS: Scanning electron microscopy, Optical inspection, Defect detection, Image segmentation, Inspection, Image processing algorithms and systems, Image enhancement, Design for manufacturing, Defect inspection, Visualization

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