Hongseok Jang
at SK Hynix Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 26 May 2022 Poster + Presentation + Paper
Philip Groeger, Ulrich Denker, Robin Zech, Stefan Buhl, Matthias Ruhm, Mingyu Kim, Hongseok Jang, Chunsoo Kang, Dongyoung Lee, Hyunjun Kim, Sukwon Park, Bohye Kim, Honggoo Lee, Sangho Lee, Dongsub Choi, Jeonghoon Lee
Proceedings Volume 12053, 1205314 (2022) https://doi.org/10.1117/12.2607571
KEYWORDS: Semiconducting wafers, Data modeling, Scanners, Critical dimension metrology, Performance modeling, Mathematical modeling, Etching, Error analysis, Algorithm development, Zernike polynomials, Modeling, Modeling and simulation

Proceedings Article | 26 May 2022 Poster + Paper
Proceedings Volume 12053, 120531Z (2022) https://doi.org/10.1117/12.2613981
KEYWORDS: Semiconducting wafers, Overlay metrology, Process control, Integrated circuits, Wafer-level optics, Scanners, Principal component analysis, Manufacturing, Inspection, Accuracy assessment

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