Dong-Min Kim
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 10 April 2024 Presentation
Proceedings Volume PC12953, PC129530N (2024) https://doi.org/10.1117/12.3010035
KEYWORDS: Extreme ultraviolet, Semiconducting wafers, Overlay metrology, Optical alignment, Logic, Process control, Modeling, Mathematical optimization

Proceedings Article | 27 April 2023 Poster + Paper
Proceedings Volume 12496, 124963N (2023) https://doi.org/10.1117/12.2670089
KEYWORDS: Deformation, Semiconducting wafers, Overlay metrology, Control systems, Optical alignment, Lithography, Machine learning

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