Mr. Gil-Woo Song Profile

Gil-Woo Song

at SAMSUNG Electronics Co Ltd

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 27 April 2023 Poster + Paper

Exploiting spatial characteristic of wafer for effective OCW: area partitioning OCW

Gilwoo Song, Dooho Kang, Sungchai Kim, Sungwon Park, Taeyong Jo, Euiseok Kum, Jonghyun Lee, Dooho Park, Dongmin Kim, Sungwoon Uh, Jaehyung Kim

Proceedings Volume 12496, 124963N (2023) https://doi.org/10.1117/12.2670089

KEYWORDS: Deformation, Semiconducting wafers, Overlay metrology, Control systems, Optical alignment, Lithography, Machine learning

Read Abstract +

Proceedings Article | 26 May 2022 Poster + Paper

Reduction in on-product overlay random error using machine learning algorithm

Gilwoo Song, Sungchai Kim, Sungwon Park, Taeyoung Jo, Euiseok Kum, Jonghyun Hwang, Seonho Lee

Proceedings Volume 12053, 120531O (2022) https://doi.org/10.1117/12.2612771

KEYWORDS: Semiconducting wafers, Overlay metrology, Optical parametric oscillators, Scanners, Metrology, Machine learning, Neural networks, Error analysis, Semiconductors, Process control

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years