Printability verification function of mask inspection system

Hideo Tsuchiya; Masaki Yamabe; Masakazu Tokita; Kenichi Takahara; Kinya Usuda; Fumio Ozaki; Nobutaka Kikuiri

doi:10.1117/12.829739

23 September 2009 Printability verification function of mask inspection system

Hideo Tsuchiya, Masaki Yamabe, Masakazu Tokita, Kenichi Takahara, Kinya Usuda, Fumio Ozaki, Nobutaka Kikuiri

Proceedings Volume 7488, Photomask Technology 2009; 74880B (2009) https://doi.org/10.1117/12.829739
Event: SPIE Photomask Technology, 2009, Monterey, California, United States

Abstract

In addition to the conventional demands for high sensitivities with which the mask inspection system detects the minute size defects, capability to extract true defects from a wide variety of patterns that should not be counted as pseudo defects has been quite demanding. It is necessary to ascertain suppression of MEEF incurred by the combination of parameters such as LER and defects of SRAF. NFT and Brion are jointly developing a mask-image based printability verification system with functions combining their respective technologies with the results from ASET's research. This report describes such defect detection results and introduces the development of a mask inspection system with printability verification function.

Citation Download Citation

Hideo Tsuchiya, Masaki Yamabe, Masakazu Tokita, Kenichi Takahara, Kinya Usuda, Fumio Ozaki, and Nobutaka Kikuiri "Printability verification function of mask inspection system", Proc. SPIE 7488, Photomask Technology 2009, 74880B (23 September 2009); https://doi.org/10.1117/12.829739

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