Paper
27 December 2002 Anatomy of a Universal Data Model
Author Affiliations +
Abstract
There are a number of factors influencing how integrated circuits are designed and manufactured notwithstanding the ongoing demand for the broader, ubiquitous, multi-functional, uninterruptible and transparent use of such technology. Functionality, speed and power are being compressed into finer, thinner and denser circuit elements the delineation of which requires manufacturing tools to operate at resolutions on the atomic scale and compute engines that render geometric data at rates exceeding tera-pixels per second. The linguistics of the design and manufacturing of integrated circuits is fractious and unruly. There is a common nature to the design and manufacture of integrated circuits but no common structure. This burgeoning confluence of fractious design and manufacturing linguistics, terabyte/second intensive data paths, a finer need to delineate features nearly the size of atoms and the ongoing need to resolve a smaller subset of larger, more complex, design and manufacturing problems with more data and computational power, needs a comprehensive and common data model. The SEMI Universal Data Model is an abstract mapping of the nature and structure of the IC design and manufacturing process. It is a common, bit-efficient, bi -directional, extensible, portable, hierarchical data base and model that expresses the organization, input/output and management of all design and manufacturing data.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas J. Grebinski "Anatomy of a Universal Data Model", Proc. SPIE 4889, 22nd Annual BACUS Symposium on Photomask Technology, (27 December 2002); https://doi.org/10.1117/12.469029
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KEYWORDS
Manufacturing

Data modeling

Design for manufacturability

Photomasks

Integrated circuit design

Integrated circuits

Standards development

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