Mr. Thomas J. Grebinski Profile

Thomas J. Grebinski

President and Chief Executive Officer at Oasis Tooling Inc

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Proceedings Article | 27 December 2002 Paper

Anatomy of a universal data model

Thomas Grebinski

Proceedings Volume 4889, (2002) https://doi.org/10.1117/12.469029

KEYWORDS: Manufacturing, Data modeling, Design for manufacturability, Photomasks, Integrated circuit design, Integrated circuits, Standards development, Reticles, Resolution enhancement technologies, Inspection

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There are a number of factors influencing how integrated circuits are designed and manufactured notwithstanding the ongoing demand for the broader, ubiquitous, multi-functional, uninterruptible and transparent use of such technology. Functionality, speed and power are being compressed into finer, thinner and denser circuit elements the delineation of which requires manufacturing tools to operate at resolutions on the atomic scale and compute engines that render geometric data at rates exceeding tera-pixels per second. The linguistics of the design and manufacturing of integrated circuits is fractious and unruly. There is a common nature to the design and manufacture of integrated circuits but no common structure. This burgeoning confluence of fractious design and manufacturing linguistics, terabyte/second intensive data paths, a finer need to delineate features nearly the size of atoms and the ongoing need to resolve a smaller subset of larger, more complex, design and manufacturing problems with more data and computational power, needs a comprehensive and common data model. The SEMI Universal Data Model is an abstract mapping of the nature and structure of the IC design and manufacturing process. It is a common, bit-efficient, bi -directional, extensible, portable, hierarchical data base and model that expresses the organization, input/output and management of all design and manufacturing data.

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