Mr. Zhijin Chen Profile

Zhijin Chen

at KLA Corp.

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 10 April 2024 Poster + Paper

Advanced pattern-centric solutions for R&D and HVM applications

Ray Xu, Zhijin Chen, Chenwei Gong, Di Yin, Khurram Zafar, Kaushik Sah

Proceedings Volume 12955, 129553R (2024) https://doi.org/10.1117/12.3015164

KEYWORDS: Line edge roughness, Semiconducting wafers, Design, Defect detection, Scanning electron microscopy, Line width roughness, Critical dimension metrology, Diffractive optical elements, High volume manufacturing, Bridges

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Proceedings Article | 10 April 2024 Poster + Paper

Hotspot discovery and variability analysis for advanced EUV processes

Kaushik Sah, Zhijin Chen, Yao Zhang, Liming Zhang, Cao Zhang, Craig Higgins, Anatoly Burov, Guy Parsey, Pradeep Vukkadala, Roel Gronheid, Arpit Jain, Ramakanth Ramini, Ankur Agrawal, Garima Sharma, Andrew Cross, Syamashree Roy, Victor Blanco

Proceedings Volume 12955, 129553H (2024) https://doi.org/10.1117/12.3011178

KEYWORDS: Stochastic processes, Scanning electron microscopy, Design, Semiconducting wafers, Inspection, Metrology, Extreme ultraviolet lithography, Defect inspection

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Proceedings Article | 25 May 2022 Presentation + Paper

EUV based multi-patterning schemes for advanced DRAM nodes

Sayantan Das, Kaushik Sah, Roberto Fallica, Zhijin Chen, Sandip Halder, Andrew Cross, Danilo De Simone, Fergo Treska, Philippe Leray, Ryoung Han Kim, Ethan Maguire, Chih-I Wei, Germain Fenger, Neal Lafferty, Jeonghoon Lee

Proceedings Volume 12055, 1205503 (2022) https://doi.org/10.1117/12.2615644

KEYWORDS: Etching, Photomasks, Extreme ultraviolet, Optical lithography, Double patterning technology

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