Prof. Yulin Qiu Profile

Prof. Yulin Qiu

at Institute of Microelectronics

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Publications (1)

Proceedings Article | 27 January 2005 Paper

The application of optical resolution enhancement technology and e-beam direct writing technology in microfabrication

Yulin Qiu, Baoqin Chen, Ming Liu, Qiuxia Xu, Lijun Xue, Liming Ren, Yong Hu, Shibing Long, Jing Lu, Xiaohui Kang, Ling Li, Jinru Li, Yueke Tang

Proceedings Volume 5645, (2005) https://doi.org/10.1117/12.576170

KEYWORDS: Lithography, Electron beam lithography, Resolution enhancement technologies, Optical proximity correction, Microelectronics, Optical lithography, Computer aided design, Photomasks, 193nm lithography, Mask making

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