Unspecified Yuchen Shi Profile

Yuchen Shi

at Osaka Univ

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Publications (1)

Proceedings Article | 8 December 2022 Paper

Fabrication of metal three-dimensional periodic nanostructures by diffraction phenomenon

Kyohei Kawakami, Yasuhiro Mizutani, Naoki Ura, Yuchen Shi, Tsutomu Uenohara, Yoshihiko Makiura, Yasuhiro Takaya

Proceedings Volume 12480, 124800D (2022) https://doi.org/10.1117/12.2660170

KEYWORDS: Silver, Metals, Nanostructures, Photoresist materials, Nanolithography, Diffraction gratings, Diffraction, Scanning electron microscopy, Refractive index, Particles

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