Dr. Tsutomu Uenohara
at Osaka Univ
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 13 March 2024 Presentation + Paper
Mona Yadi, Tsutomu Uenohara, Yasuhiro Mizutani, Yoshiharu Morimoto, Yasuhiro Takaya
Proceedings Volume 12858, 1285803 (2024) https://doi.org/10.1117/12.3002171
KEYWORDS: Vibration, Sensors, Pulse signals, Quartz, Microscopes, Microelectromechanical systems, Etching, Mode shapes, Statistical analysis, Image resolution, Remote sensing, Structural dynamics

Proceedings Article | 13 March 2024 Presentation + Paper
Proceedings Volume 12903, 129030F (2024) https://doi.org/10.1117/12.3002270
KEYWORDS: Signal to noise ratio, Signal detection, Machine learning, Sensors, Measurement uncertainty, Spatial resolution, Signal intensity, Image quality, Defect detection, Scattered light

Proceedings Article | 20 September 2023 Paper
Proceedings Volume 12607, 126070P (2023) https://doi.org/10.1117/12.3005557
KEYWORDS: Signal to noise ratio, Deep learning, Light sources and illumination, Measurement uncertainty, Image restoration, Defect inspection, Feature extraction, Error analysis, Education and training, Statistical methods

Proceedings Article | 8 December 2022 Paper
Proceedings Volume 12480, 124800D (2022) https://doi.org/10.1117/12.2660170
KEYWORDS: Silver, Metals, Nanostructures, Photoresist materials, Nanolithography, Diffraction gratings, Diffraction, Scanning electron microscopy, Refractive index, Particles

Proceedings Article | 8 December 2022 Paper
Proceedings Volume 12480, 124800C (2022) https://doi.org/10.1117/12.2660169
KEYWORDS: Ellipsometry, Surface roughness, Polarization, Refractive index, Optical testing, Neodymium, Polarizers, Scanning electron microscopy, Reflection, Ranging

Showing 5 of 9 publications
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