Dr. Yefim G. Belenky
Sr. Member of Consulting Staff at D2S Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 21 March 2007 Paper
L. Karklin, A. Arkhipov, Y. Belenky, C. Decoin, D. Lay, V. Manuylov, C. Zelnik, B. Watson, J. Willekens
Proceedings Volume 6521, 65210Q (2007) https://doi.org/10.1117/12.711774
KEYWORDS: Silicon, Optical proximity correction, Design for manufacturing, Lithography, Manufacturing, Design for manufacturability, Process modeling, Photomasks, Computer simulations, Device simulation

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top