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Jeroen Willekens
MSC and Sales Representative at Deltapatents BV
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Publications (1)
Proceedings Article | 21 March 2007 Paper
Multidimensional physical design optimization for systematic and parametric yield loss reduction
L. Karklin, A. Arkhipov, Y. Belenky, C. Decoin, D. Lay, V. Manuylov, C. Zelnik, B. Watson, J. Willekens
Proceedings Volume 6521, 65210Q (2007) https://doi.org/10.1117/12.711774
KEYWORDS: Silicon, Optical proximity correction, Design for manufacturing, Lithography, Manufacturing, Design for manufacturability, Process modeling, Photomasks, Computer simulations, Device simulation
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