Yan A. Borodovsky
Intel Senior Fellow (Retired)
SPIE Involvement:
Author
Publications (15)

SPIE Journal Paper | 11 April 2023 Open Access
JM3, Vol. 22, Issue 02, 020701, (April 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.2.020701
KEYWORDS: Manufacturing, Silicon, Semiconductors, Transistors, High volume manufacturing, Lithography, Integrated circuits, Industry, Universities, Stars

Proceedings Article | 3 April 2010 Paper
Proceedings Volume 7641, 76410S (2010) https://doi.org/10.1117/12.849022
KEYWORDS: Photomasks, Optical lithography, Glasses, Design for manufacturing, Phase shifts, SRAF, Semiconducting wafers, Cadmium, Metals, Lithography

Proceedings Article | 31 March 2010 Paper
Proceedings Volume 7639, 76391Y (2010) https://doi.org/10.1117/12.846990
KEYWORDS: Optical lithography, Floods, Lithography, Image processing, Systems modeling, Photoresist processing, MATLAB, Optical engineering, Diffraction, Semiconducting wafers

Proceedings Article | 1 April 2009 Paper
Robert Bristol, David Shykind, Sungwon Kim, Yan Borodovsky, Evan Schwartz, Courtney Turner, Georgeta Masson, Ke Min, Katherine Esswein, James Blackwell, Nikolay Suetin
Proceedings Volume 7273, 727307 (2009) https://doi.org/10.1117/12.814352
KEYWORDS: Optical lithography, Molecules, 193nm lithography, Lithography, Absorption, Near ultraviolet, Semiconducting wafers, Absorbance, Xenon, Manufacturing

Proceedings Article | 7 March 2008 Paper
Proceedings Volume 6924, 69240I (2008) https://doi.org/10.1117/12.771677
KEYWORDS: Photomasks, Optical lithography, Glasses, Semiconducting wafers, SRAF, Cadmium, Phase shifts, Modulation, Image transmission, Etching

Showing 5 of 15 publications
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