Dr. Xue Zheng Profile

Dr. Xue Zheng

at Huazhong Univ of Science and Technology

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 21 January 2022 Paper

Xue Zheng, Zhimou Xu

Proceedings Volume 12154, 121540U (2022) https://doi.org/10.1117/12.2626542

KEYWORDS: Nanostructures, Etching, Gallium nitride, Aluminum, Scanning electron microscopy, Plasma etching, Plasma, Nanostructuring, Nanotechnology

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Keywords/Phrases