Synthesis and characterization of porous anodic aluminum oxide with precise controllable pore diameter

Xue Zheng; Zhimou Xu

doi:10.1117/12.2626542

20 January 2022 Synthesis and characterization of porous anodic aluminum oxide with precise controllable pore diameter

Xue Zheng, Zhimou Xu

Proceedings Volume 12154, 13th International Photonics and OptoElectronics Meetings (POEM 2021); 121540U (2022) https://doi.org/10.1117/12.2626542
Event: 13th International Photonics and OptoElectronics Meetings (POEM 2021), 2021, Wuhan, China

Abstract

The preparation of low-cost and large-area nanostructures is one of the frontier hotspots and difficulties in the field of nanotechnology. We propose a method for the preparation of nanostructures by using plasma to etch anodic aluminum oxide (AAO) membrane. The transmission characteristics of plasma particles in AAO nanopores are explored. And the precise control of the porous AAO structure is achieved. The nanostructure is successfully transferred to the LED chip, and the luminous efficiency is improved. These studies will provide a good theoretical and technical basis for the precise transfer of nanostructures and the low-cost preparation of large-area nanostructured devices.

Citation Download Citation

Xue Zheng and Zhimou Xu "Synthesis and characterization of porous anodic aluminum oxide with precise controllable pore diameter", Proc. SPIE 12154, 13th International Photonics and OptoElectronics Meetings (POEM 2021), 121540U (20 January 2022); https://doi.org/10.1117/12.2626542

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