We report the first operation of more than 1000 hours of continuous wave (CW) 100-mW output at 266 nm which was frequency-quadrupled from a Nd:YAG or a Nd:YVO4 laser. We used a Czochralski (Cz)-grown (beta) -BaB2O4 (BBO) crystal device to double a 532-nm wave in an external ring cavity. The round trip cavity loss increasing rate was 7.6 X 10-5 percent/hour at a 266-nm power density of 270 W/cm2. The UV range optical transmission loss of the Cz-grown crystal was evaluated. The optical loss of the Cz-grown crystal for e-ray at 266 nm was improved to 2 percent/cm, which was half of the crystal grown by the top seeded solution growth (TSSG) method. The degradation rate, (delta) p equals (dP4w(t)/dt)/P4w(0), was also evaluated in 30 MW/cm2 of 266-nm generation from a Q-switched Nd:YAG laser. The (delta) p of Cz-crystal was typically 0.1 percent/hour, which was one order of magnitude lower than that of the TSSG- crystals. The fabrication process was also improved. Our system with the crystal device can be put to practical use in the areas of photolithography, material processing and ultra high-density optical disk mastering.
High power deep ultraviolet (UV) radiation has attracted much attention in areas of photolithography, micro fabrication and material processing as well as ultra high density optical disk mastering. We report progress in quality of (beta) -BaB2O4 (BBO) which is essential in obtaining 1.5 W of cw UV generation from the BBO resonant ring cavity out of 3 W of green input power from a diode pumped Nd:YAG laser. Progress in KTiOPO4 (KTP) and its potential applications are also reviewed.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.