Dr. Siqi Luo
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 11 November 2022 Presentation
Siqi Luo, Will Conley, James Bonefede, Natallia Karlitskaya, Thomas Yang, david manley, peter Oh, Rajasekhar Rao, marc sells, Josh thornes
Proceedings Volume PC12293, PC122930H (2022) https://doi.org/10.1117/12.2648306
KEYWORDS: Yield improvement, Speckle, Light sources, Helium

Proceedings Article | 21 March 2018 Paper
Yzzer Roman, Ted Cacouris, Kumar Raja Guvindan Raju, Dinesh Kanawade, Walt Gillespie, Siqi Luo, Eric Mason, David Manley, Saptaparna Das
Proceedings Volume 10587, 1058716 (2018) https://doi.org/10.1117/12.2299387
KEYWORDS: Light sources, Neon, Deep ultraviolet, Carbon, Metals, Semiconducting wafers, Helium, Semiconductors, Nitrogen

Proceedings Article | 20 June 2017 Paper
Yzzer Roman, Dinesh Kanawade, Walt Gillespie, Siqi Luo, Mark Thever, Thomas Duffey, Kevin O'Brien, Rahul Ahlawat, Andrei Dorobantu, Eric Gross, Eric Mason
Proceedings Volume 10147, 101471Y (2017) https://doi.org/10.1117/12.2260307

Proceedings Article | 15 March 2016 Paper
E. Rausa, T. Cacouris, W. Conley, M. Jackson, S. Luo, S. Murthy, G. Rechtsteiner, K. Steiner
Proceedings Volume 9780, 97801G (2016) https://doi.org/10.1117/12.2219940
KEYWORDS: Light sources, Excimer lasers, Data analysis, Gases, Lithography, Error analysis, Molybdenum, Laser scanners, 3D scanning, Neodymium, Scanners, Manufacturing, Ions

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