Dr. Sangwoong Yoon Profile

Dr. Sangwoong Yoon

at Duksan UMT Co Ltd

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Author

Publications (2)

Proceedings Article | 1 April 2009 Paper

Development of novel UV cross-linkable materials for enhancing planarity in via applications via the correlation of simulated and experimental analyses

Satoshi Takei, Michael Lin, Sangwoong Yoon, Tomoya Ohashi, Yasuyuki Nakajima, C. Grant Willson

Proceedings Volume 7273, 72730W (2009) https://doi.org/10.1117/12.813530

KEYWORDS: Ultraviolet radiation, Coating, Lithography, Etching, Semiconducting wafers, Liquids, Chemical analysis, Antireflective coatings, Dielectrics, Industrial chemicals

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Proceedings Article | 4 December 2008 Paper

A cost effective spin on sidewall material alternative to the CVD sidewall process

Daisuke Maruyama, Bang-Ching Ho, Sangwoong Yoon, Rikimaru Sakamoto, Yasushi Sakaida, Keisuke Hashimoto, Noriaki Fujitani, Hiroaki Yaguchi, Koutastu Matsubara

Proceedings Volume 7140, 714037 (2008) https://doi.org/10.1117/12.804490

KEYWORDS: Silicon, Thin film coatings, Chemical vapor deposition, Ultraviolet radiation, Double patterning technology, Lithography, Semiconducting wafers, Resistance, Interfaces, 193nm lithography

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