Mr. Michael B. Krell Profile

Michael B. Krell

at Zygo Corporation

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 22 January 2005 Paper

Surface profiler for fixed through-glass measurement

Sen Han, Erik Novak, John Wissinger, Bryan Guenther, Trisha Browne, Emilio Yanine, Michael Schurig, J. Herron, Christy McCloy, Xueyuan Li, Michael Krell, Jim Harris

Proceedings Volume 5716, (2005) https://doi.org/10.1117/12.597080

KEYWORDS: Microelectromechanical systems, Mirrors, Glasses, Silicon, Interferometry, Profilometers, Objectives, Microopto electromechanical systems, Tolerancing, Image quality standards

Read Abstract +

Proceedings Article | 22 December 2003 Paper

Calibration of high-speed optical profiler

Joanna Schmit, Michael Krell, Erik Novak

Proceedings Volume 5180, (2003) https://doi.org/10.1117/12.504930

KEYWORDS: Optical filters, Interferometers, Calibration, Scanners, Interferometry, Objectives, Motion measurement, Optical calibration, Signal detection, Standards development

Read Abstract +

Proceedings Article | 16 January 2003 Paper

Template-based software for accurate MEMS characterization

Erik Novak, Michael Krell, Trisha Browne

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.478204

KEYWORDS: Microelectromechanical systems, Microscopes, Metrology, Sensors, Image segmentation, Error analysis, Interferometry, Micromirrors, Measurement devices, Motion measurement

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years