Matthew A. Purdy
at Advanced Micro Devices Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 1 July 2003 Paper
Timothy Stanley, Richard Markle, Brad Van Eck, Brian Cusson, Matthew Purdy, K. Stanley
Proceedings Volume 5044, (2003) https://doi.org/10.1117/12.485316
KEYWORDS: Semiconducting wafers, Chemical mechanical planarization, Process control, Manufacturing, Semiconductors, Semiconductor manufacturing, Diffusion, Metrology, Copper, Logic

Proceedings Article | 1 July 2003 Paper
Jin Wang, S. Joe Qin, Christopher Bode, Matthew Purdy
Proceedings Volume 5044, (2003) https://doi.org/10.1117/12.485293
KEYWORDS: Etching, Process control, Metrology, Error analysis, Time metrology, Digital filtering, Semiconductor manufacturing, Process modeling, Control systems, Statistical analysis

Proceedings Article | 22 August 2001 Paper
Proceedings Volume 4344, (2001) https://doi.org/10.1117/12.436798
KEYWORDS: Semiconducting wafers, Etching, Scatterometry, Scanning electron microscopy, Scatter measurement, Silicon, Atomic force microscopy, Metrology, Light scattering, Diffraction

Conference Committee Involvement (1)
Advanced Process Control and Automation
27 February 2003 | Santa Clara, CA, United States
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