Mr. Marc Smits Profile

Marc Smits

Design Leader at Mapper Lithography

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 28 March 2014 Paper

Investigation of the resist outgassing and hydrocarbonaceous contamination induced in multi-electron-beam lithography tools

A.-P. Mebiene-Engohang, M. Pourteau, J. Marusic, L. Pain, T. Nakayama, A. Miyake, M. Smits, S. David, S. Labau, J. Boussey

Proceedings Volume 9049, 90492Q (2014) https://doi.org/10.1117/12.2046350

KEYWORDS: Contamination, Semiconducting wafers, Silicon, Thin film coatings, Scanning electron microscopy, Polymers, Carbon, Projection systems, Chemical species, Lithography

Read Abstract +

In emerging high-vacuum multi e-beams exposure tools, the release of hydrocarbonaceous species (precursor) by resists outgassing is unavoidable and leads to premature contamination of optics projection systems. In this work, we present an experimental methodology aiming at resist outgassing qualification. A specific experimental setup was designed to monitor the induced outgassing phenomena by irradiating resist coated on 100mm silicon wafer. The wafer can be exposed through specific silicon micromachined membranes (called mimics) that are representative of the optics projection system usually embedded in real multi e-beam exposure tools. A Quadrupole Mass Spectrometer (QMS) is plugged into the vacuum chamber and enables in-situ analysis of the by-products outgassing. Combining this tool with the Thermo Desorption - Gas Chromatography coupled to Mass Spectroscopy (TD-GC-MS) analysis, we could not only determine the outgassing amount of different resists but also identify all the outgassed by-products and their origin. Finally, the Focus Ion Beam combined to Scanning Electron Microscopy (FIB-SEM) and X-ray Photoelectron Spectroscopy (XPS) characterization techniques were used to determine the contamination layer thickness and elementary composition, respectively. A first process oriented conclusion from this work shows that the use of a thin topcoat layer can considerably reduce the resist outgassing amount and, consequently, the hydrocarbonaceous contamination layer induced on the mimics. The outgassing amount as well as the top-coat efficiency was shown to be mainly dependent on the resist chemical properties. The contamination layer growth was shown to be dependent on e-beam current density and hydrocarbon pressure in the vicinity of the mimics.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years