Mr. Liang Zhu Profile

Liang Zhu

at ChangXin Memory Technologies Inc

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 28 April 2023 Poster + Paper

Comprehensive investigation on improvement of local CDU for sub-20nm DRAM devices

Zhong Zhang, Yang Zhang, Liang Zhu, Yi Cheng, Hui Dong, Kaige Gong, Jingjing Zhao, Jun Xu, Alex Ren

Proceedings Volume 12494, 124941H (2023) https://doi.org/10.1117/12.2657250

KEYWORDS: Photoresist materials, Source mask optimization, Reticles, Etching, Light sources and illumination, Optical lithography, Lithography, Image enhancement, Phase shifts, Nanoimprint lithography, Deep ultraviolet

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Proceedings Article | 25 May 2022 Presentation + Paper

OPC accuracy improvement through deep-learning based etch model

Weina Shi, Liang Zhu, Yuqian Chen, Jiao Huang, Jinze Wang, Qian Xie, Bilun Zhang, Yunfei Xi, Wenhao Pan, Yuanxia Zheng, Yongfa Fan, Jin Cheng, Yu Zhao, Leiwu Zheng

Proceedings Volume 12056, 1205607 (2022) https://doi.org/10.1117/12.2613926

KEYWORDS: Etching, Process modeling, Data modeling, Performance modeling, Optical proximity correction, Semiconducting wafers, Scanning electron microscopy, Calibration, Model-based design, Metrology

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