A novel structure of micro-machined vibrating ring gyroscope (MVRG) with electromagnetic excitation and detection is
proposed, which consists of a ring and eight pairs of symmetric crab-leg suspension springs. The whole structure is
mirror-symmetric and centrosymmetric, providing the possibility to realize good mode-matching when the temperature
changes or acceleration shocks. The sensitivity of the MVRG is analyzed in detail, and the stability of the structure over
temperature and acceleration loads is analyzed using finite element analysis. The prototype of vibrating ring gyroscope is
successfully fabricated through bulk silicon processes which adopt only one silicon wafer without bonding process. The
gyroscope chip is assembled with SmCo permanent magnet and packaged in a metal case. The design of self-oscillation
closed-loop circuit is presented. FEA simulations show that the performance of the MVRG is stable over temperature
and acceleration loads and the structure can withstand shock loads up to 10000g without any special protection. Test
results show that the sensitivity of the MVRG is 8.9mv/°/s and the resolution is 0.05°/s with nonlinearity about 0.23% over a range of ±200°/sec.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.