Prof. Deyong Chen Profile

Prof. Deyong Chen

at Institute of Electrical Engineering

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Author

Publications (9)

Proceedings Article | 3 February 2009 Paper

Optimization of a novel structure for micromachined resonant pressure sensor

Xiaojing Shi, Deyong Chen, Junbo Wang, Zhengwei Wu

Proceedings Volume 7159, 715905 (2009) https://doi.org/10.1117/12.807588

KEYWORDS: Sensors, Silicon, Resonators, 3D modeling, Optical simulations, Wet etching, Device simulation, Boron, Electrodes, Environmental sensing

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Proceedings Article | 3 February 2009 Paper

A novel resonant pressure sensor with boron diffused silicon resonator

Junbo Wang, Xiaojing Shi, Lei Liu, Zhengwei Wu, Deyong Chen, Jinmin Zhao, Shourong Li

Proceedings Volume 7159, 71590C (2009) https://doi.org/10.1117/12.811759

KEYWORDS: Sensors, Silicon, Electrodes, Boron, Resonators, Signal to noise ratio, Finite element methods, Sensor performance, Packaging, Microelectromechanical systems

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Proceedings Article | 3 February 2009 Paper

The design and analysis of a robust micro-machined vibrating ring gyroscope

Li Chen, Deyong Chen, Junbo Wang

Proceedings Volume 7159, 71590D (2009) https://doi.org/10.1117/12.810911

KEYWORDS: Gyroscopes, Silicon, Electrodes, Finite element methods, Semiconducting wafers, Silica, Electromagnetism, Metals, Temperature metrology, Crystals

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Proceedings Article | 14 November 2002 Paper

Pressure sensor based on a microstructure with dual silicon nitride vibrating beams

Deyong Chen, Dafu Cui, Li Wang, Xiaotong Gao, Zhaoyan Fan

Proceedings Volume 4935, (2002) https://doi.org/10.1117/12.469410

KEYWORDS: Silicon, Sensors, Silicon films, Semiconducting wafers, Computer simulations, Temperature metrology, Finite element methods, Crystals, Microelectromechanical systems, Thin films

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Proceedings Article | 15 October 2001 Paper

Numerical modeling of a SiN beam resonant pressure sensor

Deyong Chen, Dafu Cui, Li Wang, Zhongyao Yu

Proceedings Volume 4601, (2001) https://doi.org/10.1117/12.444702

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Proceedings Article | 14 September 2001 Paper

Light addressable potentiometric sensor with an array of sensing regions

Weiguo Liang, JingHong Han, Hong Zhang, Deyong Chen

Proceedings Volume 4414, (2001) https://doi.org/10.1117/12.440239

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Proceedings Article | 14 September 2001 Paper

FEA modeling of a thermally excited silicon-beam resonant pressure sensor

Deyong Chen, Dafu Cui, Li Wang, Zhongyao Yu, Zheng Cui, Shanhong Xia

Proceedings Volume 4414, (2001) https://doi.org/10.1117/12.440192

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Proceedings Article | 5 April 2001 Paper

Design and modeling of a silicon resonant pressure sensor

Zheng Cui, Deyong Chen, Shanhong Xia

Proceedings Volume 4408, (2001) https://doi.org/10.1117/12.425388

KEYWORDS: Silicon, Sensors, Silicon films, Resonators, Thin films, Platinum, Computer simulations, Signal detection, Electrodes, Modeling

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Proceedings Article | 5 April 2001 Paper

Thermally excited SiN beam resonant pressure sensor

Deyong Chen, Dafu Cui, Zhongyao Yu, Li Wang, Zheng Cui, Shanhong Xia

Proceedings Volume 4408, (2001) https://doi.org/10.1117/12.425398

KEYWORDS: Sensors, Silicon, Resonators, Finite element methods, Resistors, Microelectromechanical systems, Silicon films, Signal detection, Crystals, Laser crystals

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Showing 5 of 9 publications

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