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Laura Galleni
at imec
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Publications (2)
Proceedings Article | 10 April 2024 Presentation + Paper
Actinic photoemission spectroscopy of litho materials using a table-top ultrafast EUV source
Dhirendra Singh, Kevin Dorney, Fabian Holzmeier, Esben Larsen, Laura Galleni, Charles Mokhtarzadeh, Michiel van Setten, Thierry Conard, John Petersen, Paul A. van der Heide
Proceedings Volume 12955, 1295504 (2024) https://doi.org/10.1117/12.3010751
KEYWORDS: Photoemission spectroscopy, Extreme ultraviolet lithography, Extreme ultraviolet, Photoresist materials, Photoacid generators, Chemistry, Polymers, Ultrafast laser spectroscopy, Systems modeling, Metal oxides
Proceedings Article | 1 May 2023 Presentation + Paper
A scientific framework for establishing ultrafast molecular dynamic research in imec’s AttoLab
Laura Galleni, Faegheh Sajjadian, Thierry Conard, Ivan Pollentier, Kevin Dorney, Fabian Holzmeier, Esben Witting Larsen, Daniel Escudero, Geoffrey Pourtois, Michiel van Setten, Paul van der Heide, John Petersen
Proceedings Volume 12498, 124980W (2023) https://doi.org/10.1117/12.2660047
KEYWORDS: X-ray photoelectron spectroscopy, Extreme ultraviolet lithography, Photoacid generators, Ultrafast phenomena, X-rays, Photoresist materials, Quantum processes, Extreme ultraviolet, Lithography, Stochastic processes
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