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Faegheh S. Sajjadian
at imec
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Publications (1)
Proceedings Article | 1 May 2023 Presentation + Paper
A scientific framework for establishing ultrafast molecular dynamic research in imec’s AttoLab
Laura Galleni, Faegheh Sajjadian, Thierry Conard, Ivan Pollentier, Kevin Dorney, Fabian Holzmeier, Esben Witting Larsen, Daniel Escudero, Geoffrey Pourtois, Michiel van Setten, Paul van der Heide, John Petersen
Proceedings Volume 12498, 124980W (2023) https://doi.org/10.1117/12.2660047
KEYWORDS: X-ray photoelectron spectroscopy, Extreme ultraviolet lithography, Photoacid generators, Ultrafast phenomena, X-rays, Photoresist materials, Quantum processes, Extreme ultraviolet, Lithography, Stochastic processes
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