Dr. Lars Markwort Profile

Dr. Lars Markwort

Chief Executive Officer at Nanometrics Germany GmbH

SPIE Involvement:

Author

Area of Expertise:

Process control , Semiconductor , Metrology , Inspection

Websites:

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Publications (1)

Proceedings Article | 2 April 2010 Paper

Full wafer macro-CD imaging for excursion control of fast patterning processes

Lars Markwort, Christoph Kappel, Reza Kharrazian, Pierre-Yves Guittet

Proceedings Volume 7638, 763807 (2010) https://doi.org/10.1117/12.846618

KEYWORDS: Critical dimension metrology, Semiconducting wafers, Optical lithography, Etching, Metrology, Inspection, Neodymium, Image processing, Logic, Process control

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