Dr. Christoph Kappel Profile

Dr. Christoph Kappel

Manager Systems & Optics at Nanda Technologies GmbH

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Publications (3)

Proceedings Article | 2 April 2010 Paper

Full wafer macro-CD imaging for excursion control of fast patterning processes

Lars Markwort, Christoph Kappel, Reza Kharrazian, Pierre-Yves Guittet

Proceedings Volume 7638, 763807 (2010) https://doi.org/10.1117/12.846618

KEYWORDS: Critical dimension metrology, Semiconducting wafers, Optical lithography, Etching, Metrology, Inspection, Neodymium, Image processing, Logic, Process control

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Proceedings Article | 20 December 2004 Paper

Ultrashort-pulse behavior in resonant reflection filters

Christoph Kappel, Andre Selle, Mark Bader, Gerd Marowsky

Proceedings Volume 5577, (2004) https://doi.org/10.1117/12.567365

KEYWORDS: Waveguides, Ultrafast phenomena, Dispersion, Reflection, Optical filters, Polarization, Wave propagation, Pulsed laser operation, Spectroscopy, Dielectrics

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Proceedings Article | 9 December 2004 Paper

Fabrication of sub-micron gratings in ultrathin films by 157-nm laser ablation and their application as grating waveguide structures

Mark Bader, Christoph Kappel, Andre Selle, Jurgen Ihlemann, Mi Li Ng, Peter Herman

Proceedings Volume 5578, (2004) https://doi.org/10.1117/12.567350

KEYWORDS: Waveguides, Niobium, Reflection, Laser ablation, Modulation, Absorption, Diffraction gratings, Dielectrics, Oxides, Atomic force microscopy

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