Dr. Justine Lullin Profile

Dr. Justine Lullin

R&D Engineer at Focuslight Switzerland SA

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Publications (6)

Proceedings Article | 27 April 2016 Paper

Wafer-level fabrication of arrays of glass lens doublets

Nicolas Passilly, Stéphane Perrin, Jorge Albero, Johann Krauter, Olivier Gaiffe, Ludovic Gauthier-Manuel, Luc Froehly, Justine Lullin, Sylwester Bargiel, Wolfgang Osten, Christophe Gorecki

Proceedings Volume 9888, 98880T (2016) https://doi.org/10.1117/12.2228833

KEYWORDS: Optical components, Polishing, Micro optics, Glasses, Optical aberrations, Semiconducting wafers, Microlens

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Systems for imaging require to employ high quality optical components in order to dispose of optical aberrations and thus reach sufficient resolution. However, well-known methods to get rid of optical aberrations, such as aspherical profiles or diffractive corrections are not easy to apply to micro-optics. In particular, some of these methods rely on polymers which cannot be associated when such lenses are to be used in integrated devices requiring high temperature process for their further assembly and separation. Among the different approaches, the most common is the lens splitting that consists in dividing the focusing power between two or more optical components. In here, we propose to take advantage of a wafer-level technique, devoted to the generation of glass lenses, which involves thermal reflow in silicon cavities to generate lens doublets. After the convex lens sides are generated, grinding and polishing of both stack sides allow, on the first hand, to form the planar lens backside and, on the other hand, to open the silicon cavity. Nevertheless, silicon frames are then kept and thinned down to form well-controlled and auto-aligned spacers between the lenses. Subsequent accurate vertical assembly of the glass lens arrays is performed by anodic bonding. The latter ensures a high level of alignment both laterally and axially since no additional material is required. Thanks to polishing, the generated lens doublets are then as thin as several hundreds of microns and compatible with micro-opto-electro-systems (MOEMS) technologies since they are only made of glass and silicon. The generated optical module is then robust and provide improved optical performances. Indeed, theoretically, two stacked lenses with similar features and spherical profiles can be almost diffraction limited whereas a single lens characterized by the same numerical aperture than the doublet presents five times higher wavefront error. To demonstrate such assumption, we fabricated glass lens doublets and compared them to single lenses of equivalent focusing power. For similar illumination, the optical aberrations are significantly reduced.

Proceedings Article | 26 April 2016 Paper

Vertical integration of array-type miniature interferometers at wafer level by using multistack anodic bonding

Wei-Shan Wang, Maik Wiemer, Joerg Froemel, Tom Enderlein, Thomas Gessner, Justine Lullin, Sylwester Bargiel, Nicolas Passilly, Jorge Albero, Christophe Gorecki

Proceedings Volume 9890, 989011 (2016) https://doi.org/10.1117/12.2229884

KEYWORDS: Semiconducting wafers, Interferometers, Microelectromechanical systems, Microlens, Mirau interferometers, Wafer bonding, Microopto electromechanical systems, Optical coherence tomography, Scanners, Beam splitters, Laser cutting, Gold, Glasses

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Proceedings Article | 26 April 2016 Paper

Vertical comb-drive microscanner with 4x4 array of micromirrors for phase-shifting Mirau microinterferometry

Sylwester Bargiel, Justine Lullin, Patrice Lemoal, Stéphane Perrin, Nicolas Passilly, Jorge Albero, Luc Froehly, Franck Lardet-Vieudrin, Christophe Gorecki

Proceedings Volume 9890, 98900D (2016) https://doi.org/10.1117/12.2230487

KEYWORDS: Micromirrors, Silicon, Interferometry, Optical coherence tomography, Phase shifts, Microopto electromechanical systems, Microactuators, Phase shifting, Mirau interferometers, Semiconducting wafers, Photomasks, Etching

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Proceedings Article | 26 April 2016 Paper

Array-type miniature interferometer as the core optical microsystem of an optical coherence tomography device for tissue inspection

Nicolas Passilly, Stéphane Perrin, Justine Lullin, Jorge Albero, Sylwester Bargiel, Luc Froehly, Christophe Gorecki, Johann Krauter, Wolfgang Osten, Wei-Shan Wang, Maik Wiemer

Proceedings Volume 9890, 98900C (2016) https://doi.org/10.1117/12.2229477

KEYWORDS: Skin, Microopto electromechanical systems, Optical coherence tomography, Microsystems, Mirrors, Silicon, Semiconducting wafers, Beam splitters

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Proceedings Article | 27 February 2015 Paper

Multi-wafer bonding technology for the integration of a micromachined Mirau interferometer

Wei-Shan Wang, Justine Lullin, Joerg Froemel, Maik Wiemer, Sylwester Bargiel, Nicolas Passilly, Christophe Gorecki, Thomas Gessner

Proceedings Volume 9375, 93750P (2015) https://doi.org/10.1117/12.2077641

KEYWORDS: Semiconducting wafers, Wafer bonding, Interfaces, Mirau interferometers, Microopto electromechanical systems, Microlens, Glasses, Silicon, Optical coherence tomography, Wafer-level optics

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Proceedings Article | 1 May 2014 Paper

Optical design of a vertically integrated array-type Mirau-based OCT system

J. Krauter, T. Boettcher, W. Lyda, W. Osten, N. Passilly, L. Froehly, S. Bargiel, J. Albero, S. Perrin, J. Lullin, C. Gorecki

Proceedings Volume 9132, 91320L (2014) https://doi.org/10.1117/12.2054573

KEYWORDS: Optical coherence tomography, Interferometers, Optical design, Skin, Beam splitters, Sensors, Cameras, Imaging systems, Electroluminescent displays, Tissue optics

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Showing 5 of 6 publications

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