Vertical comb-drive microscanner with 4x4 array of micromirrors for phase-shifting Mirau microinterferometry

Sylwester Bargiel; Justine Lullin; Patrice Lemoal; Stéphane Perrin; Nicolas Passilly; Jorge Albero; Luc Froehly; Franck Lardet-Vieudrin; Christophe Gorecki

doi:10.1117/12.2230487

26 April 2016 Vertical comb-drive microscanner with 4x4 array of micromirrors for phase-shifting Mirau microinterferometry

Sylwester Bargiel, Justine Lullin, Patrice Lemoal, Stéphane Perrin, Nicolas Passilly, Jorge Albero, Luc Froehly, Franck Lardet-Vieudrin, Christophe Gorecki

Author Affiliations +

Proceedings Volume 9890, Optical Micro- and Nanometrology VI; 98900D (2016) https://doi.org/10.1117/12.2230487
Event: SPIE Photonics Europe, 2016, Brussels, Belgium

Abstract

In this paper, we present construction, fabrication and characterization of an electrostatic MOEMS vertical microscanner for generation of an optical phase shift in array-type interferometric microsystems. The microscanner employs asymmetric comb-drives for a vertical displacement of a large 4x4 array of reference micromirrors and for in-situ position sensing. The device is designed to be fully compatible with Mirau configuration and with vertical integration strategy. This enables further integration of the device within an "active" multi-channel Mirau micro-interferometer and implementation of the phase shifting interferometry (PSI) technique for imaging applications. The combination of micro-interferometer and PSI is particularly interesting in the swept-source optical coherence tomography, since it allows not only strong size reduction of a system but also improvement of its performance (sensitivity, removal of the image artefacts). The technology of device is based on double-side DRIE of SOI wafer and vapor HF releasing of the suspended platform. In the static mode, the device provides vertical displacement of micromirrors up to 2.8μm (0 - 40V), whereas at resonance (fo=500 Hz), it reaches 0.7 μm for only 1VDC+1VAC. In both operation modes, the measured displacement is much more than required for PSI implementation (352nm peak-to-peak). The presented device is a key component of array-type Mirau micro-interferometer that enables the construction of portable, low-cost interferometric systems, e.g. for in vivo medical diagnostics.

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Sylwester Bargiel, Justine Lullin, Patrice Lemoal, Stéphane Perrin, Nicolas Passilly, Jorge Albero, Luc Froehly, Franck Lardet-Vieudrin, and Christophe Gorecki "Vertical comb-drive microscanner with 4x4 array of micromirrors for phase-shifting Mirau microinterferometry", Proc. SPIE 9890, Optical Micro- and Nanometrology VI, 98900D (26 April 2016); https://doi.org/10.1117/12.2230487

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