In this study, we analyzed the X-ray fluorescence of the multi-layer material with aluminum tape-based laser-induced X-ray and electron sources. We used Ti: Sapphire laser with power of 10 W, repetition rate of 1 kHz, and pulse width of 36 fs. The X-ray fluorescence signals of the multi-layer material’s surface and interior were distinguishable by the penetration depth difference between X-rays and electron sources. And the quantitative measurement of alloy samples was also measured by corresponding sources. Combining these two complementary sources can provide a useful tool for analyzing the surface and interior of multi-layer materials.
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