X-ray fluorescence measurement of multi-layer materials with the laser-induced x-ray and electron sources

Jungu Kang; Do-Kyeong Ko

doi:10.1117/12.2676592

4 October 2023 X-ray fluorescence measurement of multi-layer materials with the laser-induced x-ray and electron sources

Jungu Kang, Do-Kyeong Ko

Author Affiliations +

Proceedings Volume PC12694, Advances in X-Ray/EUV Optics and Components XVIII; PC1269403 (2023) https://doi.org/10.1117/12.2676592
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Abstract

In this study, we analyzed the X-ray fluorescence of the multi-layer material with aluminum tape-based laser-induced X-ray and electron sources. We used Ti: Sapphire laser with power of 10 W, repetition rate of 1 kHz, and pulse width of 36 fs. The X-ray fluorescence signals of the multi-layer material’s surface and interior were distinguishable by the penetration depth difference between X-rays and electron sources. And the quantitative measurement of alloy samples was also measured by corresponding sources. Combining these two complementary sources can provide a useful tool for analyzing the surface and interior of multi-layer materials.

Conference Presentation

Citation Download Citation

Jungu Kang and Do-Kyeong Ko "X-ray fluorescence measurement of multi-layer materials with the laser-induced x-ray and electron sources", Proc. SPIE PC12694, Advances in X-Ray/EUV Optics and Components XVIII, PC1269403 (4 October 2023); https://doi.org/10.1117/12.2676592

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