CONFERENCE PROCEEDINGS
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Joonsung Kim
at SAMSUNG Electronics Co Ltd
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Author
Publications (4)
SPIE Journal Paper | 26 May 2024
Mask deep check to pre-detect defects in curvilinear mask
JM3, Vol. 23, Issue 02, 021303, (May 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.2.021303
KEYWORDS: Transformers, Visualization, Inspection, Design, Performance modeling, Image classification, Defect detection, Optical proximity correction, Education and training, Deep learning
Proceedings Article | 21 November 2023 Presentation + Paper
Deep learning-based detection of mask rule check violations in curvilinear mask
Proceedings Volume 12751, 1275109 (2023) https://doi.org/10.1117/12.2685488
KEYWORDS: Transformers, Visualization, Design and modelling, Deep learning, Image classification, Data modeling
Proceedings Article | 1 May 2023 Presentation + Paper
A novel approach to etch-process-aware intensive layout retarget
Proceedings Volume 12499, 124990C (2023) https://doi.org/10.1117/12.2657880
KEYWORDS: Etching, Data modeling, Modeling, Machine learning, Design and modelling, Statistical modeling, Optical proximity correction, Reflection, Feature extraction, Artificial intelligence
Proceedings Article | 28 April 2023 Paper
Fast and accurate machine learning assisted mask optimization
Proceedings Volume 12495, 124951S (2023) https://doi.org/10.1117/12.2658321
KEYWORDS: Optical proximity correction, Machine learning, Artificial neural networks
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