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Johannes Wolf
at Micro Resist Technology GmbH
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Author
Publications (3)
Proceedings Article | 9 April 2024 Poster + Paper
Assessing hybrid polymers as innovative photolithography material allowing advanced high aspect ratio/high resolution patterns for micro-optics and patterned passivation layers
M. Russew, A. Benker, J. Herrmann, T. Oberbiermann, S. Grützner, M. Koch, J. Wolf, A. Voigt, A. Schleunitz, G. Grützner
Proceedings Volume 12956, 129560R (2024) https://doi.org/10.1117/12.3010843
KEYWORDS: Polymers, Advanced patterning, Film thickness, Two photon polymerization, Passivation, Optical lithography, Micro optics, Liquids, Manufacturing, Lithography
Proceedings Article | 1 May 2023 Presentation + Paper
Novel approach of patterning technologies enabling monolithic micro-optical components
J. Wolf, M. Ferstl, A. Voigt, S. Grützner, A. Schleunitz, G. Grützner
Proceedings Volume 12497, 124970F (2023) https://doi.org/10.1117/12.2661529
KEYWORDS: Printing, Inkjet technology, Polymers, Lenses, Manufacturing, Scanning electron microscopy, Optical components, Fabrication, Semiconducting wafers, Optics manufacturing
Proceedings Article | 28 February 2020 Presentation + Paper
Novel technology for dispensing liquid polymers of a wide viscosity range on a picoliter scale for photonic applications
P. Wachholz, J. Wolf, S. Marx, D. Weber, J. Klein, H. Schröder
Proceedings Volume 11286, 112860L (2020) https://doi.org/10.1117/12.2550566
KEYWORDS: Polymers, Microlens, Inkjet technology, Printing, Glasses, Microlens array, Ultraviolet radiation, Manufacturing, Liquids, Optical components, Integrated photonics
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