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Dr. Ilko Rahneberg
at Technische Univ Ilmenau
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Publications (4)
Proceedings Article | 7 June 2021 Paper
Interferometrical profilometer for high precision 3D measurements of free-form optics topography with large local slopes
Proceedings Volume 11853, 1185309 (2021) https://doi.org/10.1117/12.2593700
Proceedings Article | 2 October 2019 Paper
Diffraction compensation of slope errors on strongly curved grating substrates
Proceedings Volume 11109, 111090U (2019) https://doi.org/10.1117/12.2550336
KEYWORDS: Spherical lenses, Mirrors, Diffraction gratings, Spectrometers, Spectral resolution, Diffraction, X-rays, Diffraction, Ray tracing, X-rays, Optical design, Ray tracing, Error analysis, Optical design, Error analysis
Proceedings Article | 15 June 2017 Paper
High precision measurements of the free form mirror geometries
Denis Dontsov, Ilko Rahneberg, Wolfgang Pöschel, Walter Schott
Proceedings Volume 10326, 103260U (2017) https://doi.org/10.1117/12.2275266
KEYWORDS: Tolerancing, Sensors, Head, Spherical lenses, Homodyne detection, Spatial resolution, Mirrors, Interferometers, Precision measurement, Measurement devices, Optical testing, Optics manufacturing, Precision optics, Manufacturing, Laser interferometry
Proceedings Article | 18 May 2009 Paper
Optical system for the simultaneous measurement of two-dimensional straightness errors and the roll angle
Proceedings Volume 7356, 73560S (2009) https://doi.org/10.1117/12.820634
KEYWORDS: Sensors, Head, Reflectors, Interferometers, Prisms, Distance measurement, Calibration, Beam splitters, Mirrors, Diodes
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