Prof. Gerd Jäger Profile

Prof. Gerd Jäger

Consultant/Retired at Technische Univ Ilmenau

SPIE Involvement:

Author

Publications (26)

Proceedings Article | 27 May 2011 Paper

Interferometric measurement of profile deviations of large precision mirrors

Andreas Müller, Gerd Jäger, Eberhard Manske

Proceedings Volume 8082, 80821N (2011) https://doi.org/10.1117/12.889359

KEYWORDS: Mirrors, Interferometers, Interferometry, Beam splitters, Error analysis, Standards development, Motion measurement, Optical filters, Measurement devices, Polarization

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Proceedings Article | 27 May 2011 Paper

Multisensor technology based on a laser focus probe for nanomeasuring applications over large areas

Eberhard Manske, Gerd Jäger, Tino Hausotte, Torsten Machleidt

Proceedings Volume 8082, 808203 (2011) https://doi.org/10.1117/12.888445

KEYWORDS: Sensors, Laser beam diagnostics, Microscopes, Objectives, Atomic force microscopy, CCD cameras, Laser applications, Collimators, Nanostructures, Metrology

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Proceedings Article | 25 August 2010 Paper

Investigation of the metrological properties of a 3-D microprobe with optical detection system

F. Balzer, N. Hofmann, N. Dorozhovets, T. Hausotte, E. Manske, G. Jäger

Proceedings Volume 7767, 77670V (2010) https://doi.org/10.1117/12.863118

KEYWORDS: Interferometers, Metrology, Optical spheres, Head, Silicon, 3D metrology, Sensors, Beam splitters, Interferometry, Optical components

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Proceedings Article | 17 June 2009 Paper

The complete acquisition of the topography of a special multi-mirror arrangement with the help of a Fizeau interferometer

H. Xu, A. Müller, F. Balzer, B. Percle, E. Manske, G. Jäger

Proceedings Volume 7389, 73890O (2009) https://doi.org/10.1117/12.823484

KEYWORDS: Mirrors, Interferometers, Interferometry, Fizeau interferometers, Environmental sensing, Body temperature, Calibration, Wavefronts, Turbulence, Temperature metrology

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Proceedings Article | 22 May 2009 Paper

Monte Carlo simulation to determine the measurement uncertainty of a metrological scanning probe microscope measurement

Ph. Kreutzer, N. Dorozhovets, E. Manske, R. Füßl, G. Jäger, R. Grünwald

Proceedings Volume 7378, 737816 (2009) https://doi.org/10.1117/12.821794

KEYWORDS: Metrology, Interferometers, Scanning probe microscopy, Monte Carlo methods, Beam splitters, Mirrors, Scanning probe microscopes, Distance measurement, Thermal modeling, Calibration

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Proceedings Article | 18 May 2009 Paper

Optical system for the simultaneous measurement of two-dimensional straightness errors and the roll angle

I. Rahneberg, H.-J. Büchner, G. Jäger

Proceedings Volume 7356, 73560S (2009) https://doi.org/10.1117/12.820634

KEYWORDS: Sensors, Head, Reflectors, Interferometers, Prisms, Distance measurement, Calibration, Beam splitters, Mirrors, Diodes

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Proceedings Article | 31 December 2008 Paper

Limits of precision measurements based on interferometers

G. Jäger

Proceedings Volume 7130, 713002 (2008) https://doi.org/10.1117/12.819537

KEYWORDS: Interferometers, Metrology, Precision measurement, Heterodyning, Reflectors, Interferometry, Homodyne detection, Mechatronics, Helium neon lasers, Beam splitters

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Proceedings Article | 18 June 2007 Paper

Application of the metrological scanning probe microscope for high-precision, long-range, traceable measurements

N. Dorozhovets, T. Hausotte, G. Jäger, E. Manske

Proceedings Volume 6616, 661624 (2007) https://doi.org/10.1117/12.726230

KEYWORDS: Metrology, Scanning probe microscopy, Standards development, Calibration, Scanning probe microscopes, Interferometers, Homodyne detection, Atomic force microscopy, Piezoelectric drives, Mirrors

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Proceedings Article | 18 June 2007 Paper

Precision mechatronics based on high-precision measuring and positioning systems and machines

Gerd Jäger, Eberhard Manske, Tino Hausotte, Rostyslav Mastylo, Natalja Dorozhovets, Norbert Hofmann

Proceedings Volume 6616, 661621 (2007) https://doi.org/10.1117/12.732041

KEYWORDS: Interferometers, Mirrors, Sensors, Metrology, Mechatronics, Nanoprobes, Helium neon lasers, Optical testing, Spatial resolution, Atomic force microscopy

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Proceedings Article | 25 October 2006 Paper

Nanomeasuring and nanopositioning engineering

G. Jäger, T. Hausotte, E. Manske, H.-J. Büchner, R. Mastylo, N. Dorozhovets, N. Hofmann

Proceedings Volume 6280, 628001 (2006) https://doi.org/10.1117/12.715237

KEYWORDS: Interferometers, Mirrors, Sensors, Metrology, Atomic force microscopy, Sensor technology, Nanoprobes, Microscopes, Spatial resolution, Optical testing

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Proceedings Article | 14 August 2006 Paper

A new traceable method for determination of periodic nonlinearities of interferometers

I. Schmidt, G. Jäger, T. Hausotte, E. Manske, R. Füßl

Proceedings Volume 6292, 629206 (2006) https://doi.org/10.1117/12.680613

KEYWORDS: Interferometers, Mirrors, Motion measurement, Calibration, Demodulation, Control systems, Sensors, Motion analysis, Laser stabilization, Time metrology

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Proceedings Article | 14 August 2006 Paper

Development of the interferometrical scanning probe microscope

N. Dorozhovets, T. Hausotte, N. Hofmann, E. Manske, G. Jäger

Proceedings Volume 6293, 629311 (2006) https://doi.org/10.1117/12.680692

KEYWORDS: Scanning probe microscopy, Interferometry, Interferometers, Metrology, Atomic force microscopy, Calibration, Piezoelectric drives, Scanning probe microscopes, Control systems, Beam splitters

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Proceedings Article | 19 May 2006 Paper

Improved homodyne laser interferometer used in micro-vibration analysis

T. Guo, J. Chen, D. Dontsov, X. Fu, X. Hu, G. Jäger

Proceedings Volume 6150, 61502A (2006) https://doi.org/10.1117/12.676885

KEYWORDS: Interferometers, Speckle, Homodyne detection, Atomic force microscopy, Sensors, Signal detection, Signal processing, Vibrometry, Light scattering, Interferometry

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Proceedings Article | 27 April 2006 Paper

Metrological scanning probe microscope

N. Dorozhovets, T. Hausotte, E. Manske, G. Jäger, N. Hofmann

Proceedings Volume 6188, 61880L (2006) https://doi.org/10.1117/12.664407

KEYWORDS: Scanning probe microscopy, Metrology, Interferometers, Atomic force microscopy, Scanning probe microscopes, Piezoelectric drives, Actuators, Control systems, Beam splitters, Microscopes

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Proceedings Article | 24 March 2006 Paper

Long-range nanopositioning and nanomeasuring machine for application to micro- and nanotechnology

Gerd Jäger, Tino Hausotte, Hans-Joachim Büchner, Eberhard Manske, Ingomar Schmidt, Rostyslav Mastylo

Proceedings Volume 6152, 615224 (2006) https://doi.org/10.1117/12.655156

KEYWORDS: Interferometers, Mirrors, Sensors, Metrology, Atomic force microscopy, Optical testing, Sensor technology, Microscopes, Spatial resolution, Nanotechnology

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Proceedings Article | 20 October 2005 Paper

Nanopositioning and nanomeasuring machine for high accuracy measuring procedures of small features in large areas

E. Manske, T. Hausotte, R. Mastylo, N. Hofmann, G. Jäger

Proceedings Volume 5965, 596509 (2005) https://doi.org/10.1117/12.624791

KEYWORDS: Sensors, Mirrors, Interferometers, Microscopes, Calibration, Holograms, Diffraction, Sensor technology, Integrated optics, Metrology

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Proceedings Article | 31 August 2005 Paper

Application of a positioning and measuring machine for metrological long-range scanning force microscopy

T. Hausotte, G. Jaeger, E. Manske, N. Hofmann, N. Dorozhovets

Proceedings Volume 5878, 587802 (2005) https://doi.org/10.1117/12.620882

KEYWORDS: Atomic force microscopy, Sensors, Interferometers, Calibration, Motion measurement, Head, Metrology, Standards development, Mirrors, Actuators

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Proceedings Article | 13 June 2005 Paper

A focus sensor for an application in a nanopositioning and nanomeasuring machine

Rostyslav Mastylo, Denis Dontsov, Eberhard Manske, Gerd Jager

Proceedings Volume 5856, (2005) https://doi.org/10.1117/12.612887

KEYWORDS: Sensors, Holograms, CCD image sensors, Semiconductor lasers, Calibration, Standards development, Laser development, CCD cameras, Microscopes, Optical scanning

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Proceedings Article | 14 February 2005 Paper

Integration of probe systems in a nanopositioning and nanomeasuring machine

Gerd Jaeger, Eberhard Manske, Tino Hausotte, Rostyslav Mastylo, Hans-Joachim Buechner, Rainer Gruenwald, Roland Fussl

Proceedings Volume 5776, (2005) https://doi.org/10.1117/12.611848

KEYWORDS: Sensors, Mirrors, Interferometers, System integration, Sensor technology, Calibration, Scanning probe microscopy, Photomasks, Wafer inspection, Metrology

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Proceedings Article | 20 December 2004 Paper

Design and investigation of an optical standing-wave interferometer for displacement measurements

Hans-Joachim Buechner, Viktor Mandryka, Gerd Jaeger

Proceedings Volume 5594, (2004) https://doi.org/10.1117/12.570214

KEYWORDS: Photodiodes, Mirrors, Interferometers, Sensors, Transparent conductors, Signal detection, Wave propagation interference, Phase shifts, Wave propagation, Optics manufacturing

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Proceedings Article | 10 September 2004 Paper

Design aspects in the development of a standing wave interferometer

Viktor Mandryka, Hans Buchner, Gerd Jager

Proceedings Volume 5457, (2004) https://doi.org/10.1117/12.546708

KEYWORDS: Sensors, Mirrors, Photodiodes, Interferometers, Reflectivity, Phase shifts, Reflection, Photodetectors, Coating, Transparent conductors

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Proceedings Article | 27 July 2004 Paper

Interferometric sensor and calibration system for high-precision applications

Matthias Welter, Eberhard Manske, Gerd Jaeger

Proceedings Volume 5384, (2004) https://doi.org/10.1117/12.538913

KEYWORDS: Calibration, Sensors, Interferometers, Interferometry, Digital signal processing, Signal processing, MATLAB, Actuators, Signal detection, Wavefronts

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Proceedings Article | 20 November 2003 Paper

Miniature interferometers for applications in microtechnology and nanotechnology

Gerd Jager, Eberhard Manske, Tino Hausotte, Roland Fußl, Rainer Grunwald, Hans Buchner, Walter Schott, Denys Dontsov

Proceedings Volume 5190, (2003) https://doi.org/10.1117/12.507906

KEYWORDS: Interferometers, Retroreflectors, Sensors, Microscopes, Metrology, Microtechnology, Nanotechnology, Interferometry, Fiber optics, Waveguides

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Proceedings Article | 30 May 2003 Paper

Standing-wave interferometer based on partially transparent photodiodes

Hans Buchner, Eerke Bunte, Viktor Mandryka, Helmut Stiebig, Gerd Jaeger

Proceedings Volume 5144, (2003) https://doi.org/10.1117/12.499902

KEYWORDS: Photodiodes, Transparent conductors, Mirrors, Interferometers, Photodetectors, Reflection, Coating, Wave propagation interference, Glasses, Optical instrument design

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Proceedings Article | 29 July 2002 Paper

Nanopositioning and measuring technique

Gerd Jaeger, Eberhard Manske, Tino Hausotte, Hans-Joachim Buechner, Rainer Gruenwald

Proceedings Volume 4900, (2002) https://doi.org/10.1117/12.484563

KEYWORDS: Mirrors, Microscopes, Sensors, Interferometers, Zerodur, Nanotechnology, Metrology, Laser systems engineering, Sensor technology, Manufacturing

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