Dr. Huikan Liu Profile

Dr. Huikan Liu

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 12 April 2013 Paper

Enabling reverse tone imaging for via levels using attenuated phase shift mask and source optimization

Bassem Hamieh, Hyun Chol Choi, Burcin Erenturk, Wei Guo, Ayman Hamouda, Huikan Liu, Gregory McIntyre, Jason Meiring, David Moreau, Alan Thomas, Alexander Wei

Proceedings Volume 8683, 86830J (2013) https://doi.org/10.1117/12.2011349

KEYWORDS: Photomasks, Source mask optimization, Printing, Data modeling, SRAF, Phase shifts, Photovoltaics, Image processing, Nanoimprint lithography, Binary data

Read Abstract +

Proceedings Article | 12 April 2013 Paper

Benchmarking study of 3D mask modeling for 2X and 1X nodes

ChangAn Wang, Chao-Chun Liang, Huikan Liu, Chidam Kallingal, Derren Dunn, James Oberschmidt, Jaione Tirapu Azpiroz

Proceedings Volume 8683, 86831A (2013) https://doi.org/10.1117/12.2011485

KEYWORDS: Photomasks, 3D modeling, Optical proximity correction, Performance modeling, Data modeling, Calibration, Critical dimension metrology, Metals, Error analysis, Diffraction

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years