Mr. Hak-Yong Sim Profile

Hak-Yong Sim

at SK Hynix Inc

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Publications (2)

Proceedings Article | 26 March 2019 Presentation + Paper

OPC model accuracy study using high volume contour based gauges and deep learning on memory device

Young-Seok Kim, SeIl Lee, Zhenyu Hou, Yiqiong Zhao, Meng Liu, Yunan Zheng, Qian Zhao, Daekwon Kang, Lei Wang, Mark Simmons, Mu Feng, Jun Lang, Byoung-Il Choi, Gilbert Kim, Hakyong Sim, Jongcheon Park, Gyun Yoo, JeonKyu Lee, Sung-woo Ko, Jaeseung Choi, Cheolkyun Kim, Chanha Park

Proceedings Volume 10959, 1095913 (2019) https://doi.org/10.1117/12.2515274

KEYWORDS: Calibration, Metrology, Optical proximity correction, Data modeling, Instrument modeling, Scanning electron microscopy, Time metrology, Neural networks, Semiconducting wafers

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Proceedings Article | 23 March 2011 Paper

Study of various RET for process margin improvement in 3Xnm DRAM contact

Hak-Yong Sim, Hyoung-Soon Yune, Yeong-Bae Ahn, James Moon, Byoung-Sub Nam, Donggyu Yim, Sung-Ki Park

Proceedings Volume 7973, 79732N (2011) https://doi.org/10.1117/12.879206

KEYWORDS: Photomasks, Resolution enhancement technologies, Electroluminescence, Optical lithography, Semiconducting wafers, Mask making, Scanning electron microscopy, Lithography, Double patterning technology, Image processing

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