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Daniel Kapusi
at Technische Univ Ilmenau
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Publications (1)
Proceedings Article | 18 June 2007 Paper
White light interferometry in combination with a nanopositioning and nanomeasuring machine (NPMM)
Daniel Kapusi, Torsten Machleidt, Karl-Heinz Franke, Rainer Jahn
Proceedings Volume 6616, 661607 (2007) https://doi.org/10.1117/12.726114
KEYWORDS: Optical interferometry, Cameras, Light sources, Standards development, Time metrology, 3D imaging standards, Sensors, Visualization, 3D metrology, Environmental sensing
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